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Procurable · sourced on request

Tescan MIRA3

UsedTescanOptical detectorsNetherlands
Procurable

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Accelerating Voltage
0–30 kV
Filament
Schottky Field Emitter
Vacuum System
Sputter Ion Pump for FEG; Molecular Drag Pump for chamber and column
PicoIndenter Load Transducers
Low Load Transducer: maximum 15 mN indent / 14 mN tensile; High Load Transducer: maximum 500 mN indent / 100 mN tensile
PicoIndenter Maximum Displacement
150 µm
Availability
Procurable
Lead time
Confirmed with your quote
All 29 specifications
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Specifications 29

Brands
Tescan
New/Used
Used
Accelerating Voltage
0–30 kV
Filament
Schottky Field Emitter
Vacuum System
Sputter Ion Pump for FEG; Molecular Drag Pump for chamber and column
PicoIndenter Load Transducers
Low Load Transducer: maximum 15 mN indent / 14 mN tensile; High Load Transducer: maximum 500 mN indent / 100 mN tensile
PicoIndenter Maximum Displacement
150 µm
PicoIndenter Force Noise Floor Inside SEM
Low Load: <0.4 µN; High Load: <5 µN
PicoIndenter Displacement Noise Floor Inside SEM
<1 nm
PicoIndenter Tilt-Rotation Stage Maximum Load
400 mN
PicoIndenter In-Situ Heating Elements
Indentation at temperatures up to 800°C
Secondary Electron Imaging Detector
Everhart-Thornley Detector (ETD)
Backscattered Electron Detector
Working Distance > 8 mm
Energy-Dispersive X-ray Spectroscopy (EDS) Detector
Working Distance = 15 mm, EDAX
Electron Backscatter Diffraction (EBSD) Detector
Working Distance = 10–20 mm, EDAX Hikari Camera
Maximum Specimen Weight
8 kg
Sample Stage Movement
X, Y: ±65 mm; Z: 0 to 100 mm; Tilt: ±90 degrees
PicoIndenter Sample Positioning Range
12 mm (Z) x 26 mm (X) x 29 mm (Y indentation axis)
PicoIndenter Probes
Standard Berkovich (1); Flat-end (3): 1 µm, 5 µm, 20 µm; Cube corner (1); Cono-spherical (1) tip radius <1 µm; 800°C Berkovich (1) for heating stage only
Sample Requirements
Not for magnetic materials, especially powder samples; Samples must be compatible with high vacuum, clean and dry; Samples should be conductive and connected to ground; Non-conductive samples should be coated with a conductive layer (e.g., Au or Carbon) and connected to the SEM stub
Electron Beam Lithography Wafer Size
Up to 20 x 20 mm
Scanning Electron Microscope Resolution
1.2 nm at 30 kV
Imaging Modes
Resolution Mode (Working Distance = 5–10 mm), Depth Mode, Field Mode, Wide Field Mode (Working Distance > 25 mm)
Electron Beam Lithography Minimum Electron Beam Spot Size
Approximately 2.5 nm
Electron Beam Lithography Minimum Electron Beam Current
Approximately 10 pA
Chamber Internal Diameter
340 mm (width) x 315 mm (depth)
Maximum Specimen Height
145 mm without rotation stage; 116 mm with rotation stage
Availability
Procurable
Lead time
Confirmed with your quote

Product description

High-res SEM with Schottky field emission gun, multiple imaging modes, EDS and EBSD analysis, large sample chamber.

Tescan MIRA3 is a high-performance scanning electron microscope (SEM) designed for detailed imaging and analysis at the micro and nano scales. Equipped with a high-brightness Schottky field emission gun, this instrument delivers high-resolution, low-noise images, making it indispensable for researchers requiring precise material characterization.

Key features include:

  • High-resolution imaging: Achieves resolutions up to 1.2 nm at 30 kV, facilitating detailed surface examinations.
  • Versatile imaging modes: Offers multiple modes such as Resolution, Depth, and Wide Field, catering to diverse research needs.
  • Advanced detectors: Equipped with secondary electron (SE), backscattered electron (BSE), and in-beam detectors for comprehensive sample analysis.
  • Analytical capabilities: Integrates energy-dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD) for elemental and crystallographic analysis.
  • Large chamber design: Accommodates sizable samples, enhancing flexibility in experimental setups.

The Tescan MIRA3 is widely utilized across various scientific domains, including materials science, geology, biotechnology, and nanotechnology. In the biotechnology sector, it plays a crucial role in:

  • Biomaterial analysis: Examining the microstructure of scaffolds used in tissue engineering.
  • Nanoparticle characterization: Assessing size, morphology, and composition of nanoparticles for drug delivery systems.
  • Cell imaging: Investigating cellular structures and interactions at high magnifications.

Commonly found in university laboratories, biomedical research centres, and industrial R&D facilities, the Tescan MIRA3 has been a valuable asset since its release in 2016. Its advanced features and adaptability make it a preferred choice for professionals seeking reliable and precise imaging solutions in the biotechnology industry.

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Frequently asked questions

How long does laboratory equipment typically last?

With a service contract, ten to fifteen years is normal for most benchtop instruments. Detectors and pumps are the parts that wear first.

Can I get service for older equipment?

Yes. Every verified supplier states which service partners cover the instrument, and we list that alongside the offer.

Where can I buy parts?

Ask a scientist through the request button. Parts are often available even when the instrument itself is discontinued.

What is the typical lead time for refurbished equipment?

Two to six weeks, depending on refurbishment scope and whether calibration is included.

Does laboratory equipment ship internationally?

We ship to 38 countries. Crating and customs handling are quoted with the instrument.

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Last updated 19 October 2026