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Zeiss Auriga

UsedZeissSemiconductor testNetherlands
Procurable

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Electron Source Filament
Schottky field emitter
Power Supply Voltage
208-230 V
Power Supply Current
22 A
Electron Optics Lens System
Patented GEMINI® electromagnetic/electrostatic objective lens system
Electron Optics Stigmator
Eight pole electromagnetic
Availability
Procurable
Lead time
Confirmed with your quote
All 38 specifications
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  • Response within 1 hour
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  • Support from a scientist

Specifications 38

Brands
Zeiss
New/Used
Used
Electron Source Filament
Schottky field emitter
Power Supply Voltage
208-230 V
Power Supply Current
22 A
Electron Optics Lens System
Patented GEMINI® electromagnetic/electrostatic objective lens system
Electron Optics Stigmator
Eight pole electromagnetic
Electron Optics Apertures
Seven apertures with electromagnetic selection
Electron Optics Beam Shift Width
±100 µm
Electron Optics Extended Beam Shift Width
±100 µm
Electron Optics Working Distance
5 – 8 mm
Electron Optics Lens Cooling
Water cooling for best thermal stability and reproducibility
Electron Optics Aperture Selection
Electromagnetic selection
Electron Optics Beam Shift
±100 µm
Electron Optics Extended Beam Shift
±100 µm
SEM Resolution at 15 kV
1.0 nm
SEM Resolution at 1 kV
1.9 nm
SEM Probe Current Range
4 pA - 20 nA
SEM Magnification Range
12x - 1,000,000x
FIB Resolution at 30 kV
<7 nm
FIB Probe Current Range
1 pA - 50 nA
FIB Magnification Range
300x - 500,000x
SEM Acceleration Voltage Range
0.1 - 30 kV
FIB Acceleration Voltage Range
1 - 30 kV
Specimen Stage X-Axis Movement
100 mm
Specimen Stage Y-Axis Movement
100 mm
Specimen Stage Z-Axis Movement
55 mm
Specimen Stage Tilt Range
-10° to 60°
Specimen Stage Rotation
360° continuous
Specimen Stage Maximum Load
0.5 kg
Specimen Chamber Diameter
330 mm
Specimen Chamber Height
270 mm
Minimum Footprint
2.3 m x 2.7 m
Minimum Working Area
3.0 m x 4.0 m
Specimen Chamber Accessory Ports
15
Specimen Chamber Viewing Cameras
2 x IR CCD cameras
Availability
Procurable
Lead time
Confirmed with your quote

Product description

Integrated SEM/FIB system with 1 nm resolution SEM, 1-30 kV ion beam, and multiple detectors for nanofabrication and analysis.

Zeiss Auriga is a state-of-the-art dual-beam workstation that seamlessly integrates a high-resolution scanning electron microscope (SEM) with a precision focused ion beam (FIB) system. This combination enables detailed imaging and precise nanofabrication, making it indispensable for advanced research applications.

Key features include:

  • High-resolution imaging: Achieves SEM resolutions of 1.0 nm at 15 kV and 1.9 nm at 1 kV, facilitating detailed surface analysis.
  • Versatile ion beam operation: FIB column operates between 1 kV and 30 kV with currents from 1 pA to 20 nA, allowing for precise material modification.
  • Comprehensive detector suite: Equipped with in-lens secondary electron detectors, backscattered electron detectors, and scanning transmission electron detectors for multifaceted analysis.
  • Advanced gas injection system: Facilitates deposition of materials like carbon, tungsten, and platinum, enhancing fabrication capabilities.
  • In situ micromanipulator: Enables precise sample handling and preparation, essential for tasks such as TEM sample preparation.

This instrument is widely applied in:

  • Biotechnology: Essential for tasks like gene editing, synthetic biology, and molecular diagnostics, where precise sample manipulation and imaging are crucial.
  • Materials science: Facilitates the development and analysis of nanostructured materials.
  • Semiconductor research: Supports the fabrication and examination of microelectronic components.
  • Nanotechnology: Enables the creation and study of nanoscale devices and structures.

Commonly utilized in:

  • University laboratories: Supports academic research and education in nanoscience and biotechnology.
  • Biomedical research centres: Aids in the development of medical technologies and therapies.
  • Industrial R&D facilities: Drives innovation in sectors like pharmaceuticals and electronics.

Introduced in the early 2010s, the Zeiss Auriga remains a pivotal tool in cutting-edge research, particularly within the biotechnology industry, where its capabilities are critical for advancements in areas such as bioprocessing and biomanufacturing.

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Frequently asked questions

How long does laboratory equipment typically last?

With a service contract, ten to fifteen years is normal for most benchtop instruments. Detectors and pumps are the parts that wear first.

Can I get service for older equipment?

Often, yes. Verified suppliers frequently work with service partners converting the instrument. If applicable, we can list servicing options alongside the offer.

Where can I buy parts?

Ask a scientist through the request button. Parts are often available even when the instrument itself is discontinued.

What is the typical lead time for refurbished equipment?

Two to six weeks, depending on refurbishment scope and whether calibration is included.

Does laboratory equipment ship internationally?

We ship to 38 countries. Crating and customs handling are quoted with the instrument.

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Can't find the exact configuration?

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Last updated 9 November 2026