Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab
Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab This system was removed from a (more) university lab where it was surplus to requirement. The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.It is in good cosmetic condition with all units included in good working order. The system comprises the following components: - Thermo Vacuum Generators main reaction chamber Serial No. CH0412005- 2 x Softshut gate units Part No. V10EA100 Serial Nos. SS0412002 SS0412003- Leybold Turbovac Pump Serial No. 30000045767 - Pfeiffer Vacuum compact cold cathode gauge Type IKR261 BOC Edwards EXT75DX turbomolecular high vacuum pumpSerial No. 046074705- 3 x Luftkuelung pump cooling fans - 3 x Vulcatherm V1 1000W heaters - 2 x Elstein FSR 1000W heaters - RHC Vacuum Generators ZRHC substrate heater controller Serial No. RC0407002- Turbotronik NT20 and NT10 analysis chamber and load lock control unit Serial No. 30000050971- Thermo Electron AML pressure gauge controller Serial No. 0006- Thermo Electron 8558 argon etch gun controller Serial No. G117- Hiden Analytical ion gun turbo interface - Pfeiffer ion gas gun gauge - Power breaker circuit box - Leybold vacuum pump Type D16B serial No. 30000044357 - Edwards vacuum pump E2M1 serial No. 046078290 - Leybold vacuum pump type S1.5 serial No. 20900831099 Additional parts: - 2 x 16 amp cartridge fuses - 14 x 2 amp cartridge fuses - 1 x filament for ion gauge DC7033AA - 2 x air 1/4" tee pieces - 1 x pfeiffer seal for ion gun BN846241-T - 4 x resistor filaments - 1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x Operating and instruction manuals: - Thermo EX03 Ion Gun System - Thermo High Pressure Gas Cell - Arun Microelectronics Pressure Gauge Controller Interface - Pfeiffer Vacuum TPG261 - Varian MidiVac Controller 929-x - Varian Sublimation Controller 929-x - Leybold Turbovac - Leybold turbotronik NT20 - NT10 - Eurotherm 2132 and 2166 PID Temperature Controllers
£30,000.00 ex VAT
United Kingdom
deposition equipment, vacuum equipment other