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Thermo Vacuum Generators High Vacuum Deposition System

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Product Description

The Thermo Vacuum Generators High Vacuum Deposition Sputtering System is a sophisticated laboratory setup designed for precision material deposition through sputtering processes. Previously part of a university lab, it was fully operational upon last use, achieving a high vacuum level of 10^-9 mbar. All components are in good cosmetic and functional condition, making it ideal for advanced research applications.

The system includes the following:

  • Thermo Vacuum Generators main reaction chamber with serial number CH0412005
  • Two Softshut gate units, part number V10EA100, serial numbers SS0412002 and SS0412003
  • Leybold Turbovac Pump, serial number 30000045767
  • Pfeiffer Vacuum IKR261 compact cold cathode gauge
  • BOC Edwards EXT75DX turbomolecular high vacuum pump, serial number 046074705
  • Three Luftkuelung pump cooling fans
  • Three Vulcatherm V1 1000W heaters
  • Two Elstein FSR 1000W heaters
  • RHC Vacuum Generators ZRHC substrate heater controller, serial number RC0407002
  • Turbotronik NT20 and NT10 analysis chamber and load lock control unit, serial number 30000050971
  • Thermo Electron AML pressure gauge controller, serial number 0006
  • Thermo Electron 8558 argon etch gun controller, serial number G117
  • Hiden Analytical ion gun turbo interface
  • Pfeiffer ion gas gun gauge
  • Power breaker circuit box
  • Leybold vacuum pump Type D16B, serial number 30000044357
  • Edwards vacuum pump E2M1, serial number 046078290
  • Leybold vacuum pump Type S1.5, serial number 20900831099

Additional parts include:

  • Two 16 amp cartridge fuses
  • Fourteen 2 amp cartridge fuses
  • One filament for ion gauge DC7033AA
  • Two air 1/4" tee pieces
  • One Pfeiffer seal for ion gun BN846241-T
  • Four resistor filaments
  • One Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x

The system comes equipped with comprehensive operating and instructional manuals for optimal usage and maintenance.


Item Stats

Status
For Sale
State
used
Brand
Thermo Scientific
Location
London - United Kingdom

Product details

Electrical Supply1-Phase
Plug Included? (1-Phase)No Plug (Hard-wired appliance)
PAT Test ResultPass
PAT Test Date30-08-2024
Voltage240V
Year of Manufacture2004

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From €20,600.03*ex. VAT

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