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Thermo Vacuum Generators High Vacuum Deposition Sputtering System Lab
This system was removed from a university lab where it was surplus to requirement.
The previous client has stated that it was in full working order when last used, reaching 10<sup style="color: rgb(51, 60, 68); background-color: rgb(255, 255, 255);">-9</sup> mbar vacuum.It is in good cosmetic condition with all units included in good working order.
The system comprises the following components:
- Thermo Vacuum Generators main reaction chamber
Serial No. CH0412005- 2 x Softshut gate units Part No. V10EA100
Serial Nos. SS0412002 SS0412003- Leybold Turbovac Pump Serial No. 30000045767
- Pfeiffer Vacuum compact cold cathode gauge Type IKR261
BOC Edwards EXT75DX turbomolecular high vacuum pumpSerial No. 046074705- 3 x Luftkuelung pump cooling fans
- 3 x Vulcatherm V1 1000W heaters
- 2 x Elstein FSR 1000W heaters
- RHC Vacuum Generators ZRHC substrate heater controller
Serial No. RC0407002- Turbotronik NT20 and NT10 analysis chamber and load lock control unit
Serial No. 30000050971- Thermo Electron AML pressure gauge controller
Serial No. 0006- Thermo Electron 8558 argon etch gun controller
Serial No. G117- Hiden Analytical ion gun turbo interface
- Pfeiffer ion gas gun gauge
- Power breaker circuit box
- Leybold vacuum pump Type D16B serial No. 30000044357
- Edwards vacuum pump E2M1 serial No. 046078290
- Leybold vacuum pump type S1.5 serial No. 20900831099
Additional parts:
- 2 x 16 amp cartridge fuses
- 14 x 2 amp cartridge fuses
- 1 x filament for ion gauge DC7033AA
- 2 x air 1/4" tee pieces
- 1 x pfeiffer seal for ion gun BN846241-T
- 4 x resistor filaments
- 1 x Kurt J. Lesker 500g net tin of molecular sieve 1/8" pellets Type 13x
Operating and instruction manuals:
- Thermo EX03 Ion Gun System
- Thermo High Pressure Gas Cell
- Arun Microelectronics Pressure Gauge Controller Interface
- Pfeiffer Vacuum TPG261
- Varian MidiVac Controller 929-x
- Varian Sublimation Controller 929-x
- Leybold Turbovac
- Leybold turbotronik NT20 - NT10
- Eurotherm 2132 and 2166 PID Temperature Controllers
Electrical Supply | N/A |
Year of Manufacture | N/A |
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