Oxford Instruments Plasmalab 80 Plus Reactive Ion Etcher (For Spares/Repair)

The Oxford Instruments Plasmalab 80 Plus ICP Reactive Ion Etcher, removed from a university setting due to excess equipment, is available as a spares/repair item. Although the system is cosmetically sound, operational tests could not be conducted because it cannot be powered on, affected by the radiation safety protocol. The accompanying HP Vectra VE PC, including keyboard and mouse, experiences power issues, shutting down five seconds after startup, impeding diagnostic checks. The unit has two noted malfunctions: one RF generator is non-functional—restricting operations to Reactive Ion Etching (RIE). A repair quote of £1500 was provided but not acted upon. Additionally, the nitrogen purge valve has been removed and used in another system (Plasmalab 100), potentially impacting functionality. The package also includes two Advanced Energy RF Power Supply units, model RFX600A.