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ATV PEO-604 Thermal Oxidation Furnace with Chiller and Control Laptop
Product Description
The ATV PEO-604 Thermal Oxidation Furnace is a specialized semiconductor wafer processing system designed for dry and wet oxidation applications, critical in biotechnology semiconductor fabrication, molecular diagnostics device manufacturing, and bioprocessing equipment production. Key technical specifications include:
- Maximum operating temperature: 1100°C, supporting high-temperature thermal oxidation processes essential for silicon wafer oxidation and surface modification.
- Wafer capacity: Configured for 4” (100 mm) wafers with upgrade capability to 6” wafers through replacement quartzware, enabling flexible adaptation to various semiconductor manufacturing workflows.
- Integrated water bubbler system: Enables precise steam generation for wet oxidation, a critical step in enhancing oxide layer quality in wafer fabrication used in microelectronic and bioMEMS research.
- Commissioning and maintenance: Commissioned in April 2023, with the latest annual service and calibration completed on 29/08/2024, ensuring reliability and accuracy in oxidation process control.
- Included equipment: Comes with a closed-loop air-cooled compressor-based water chiller for temperature regulation, an ATV laptop with WinATV software for process monitoring and control, wafer boat carriers, dummy wafer boats, and secure packaging for quartzware (removed for safe transport).
This system is widely adopted in synthetic biology research and biopharmaceutical production pipelines where precise thermal oxidation of semiconductor substrates supports device fabrication for lab-on-a-chip, biosensor, and diagnostic tool development. The furnace’s ability to support both dry and wet oxidation processes makes it indispensable for research teams focused on biotechnology-driven wafer processing and advanced semiconductor material modification.
Transport and handling require professional expertise due to the instrument’s sensitive components and quartzware. This equipment is ideal for research institutes and industrial labs engaged in biotechnology semiconductor processing, gene editing device manufacturing, and biomanufacturing R&D applications.
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Northeastern UniversityFrom €34,627.68*ex. VAT
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